Applications of AlN thin-film resonator topologies as antennas and sensors

Robert J. Weber, Stanley G. Burns, Charles F. Campbell, Ron O'Toole

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.

Original languageEnglish (US)
Pages (from-to)161-164
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Volume1
StatePublished - Jun 1 1992
Event1992 IEEE MTT-S International Microwave Symposium Digest Part 2 (of 3) - Albuquerque, NM, USA
Duration: Jun 1 1992Jun 5 1992

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