Application of particle beam mass spectrometry to aerosol formation and transport in silane LPCVD

S. Nijhawan, N. P. Rao, P. H. Mcmurry, S. A. Campbell, J. E. Brockmann

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)S81-S82
JournalJournal of Aerosol Science
Issue numberSUPPL 1
StatePublished - Sep 1998


  • Chemical Vapor Deposition
  • Contamination Control
  • Semiconductor Processing
  • Silicon
  • Thermophoresis

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