Analysis of Pattern-dependent Rapid Thermal Annealing Effects on SRAM Design

Keyphrases

• Thermal Annealing Effect 100%
• Rapid Thermal Annealing 100%
• SRAM Design 100%
• Mitigation Strategies 28%
• Layout Pattern 28%
• Read Delay 28%
• Transistor 14%
• Mitigation Techniques 14%
• Digital Design 14%
• Parameter Variation 14%
• Thermal Conductivity 14%
• Temperature-dependent Thermal Conductivity 14%
• Emissivity 14%
• Annealing 14%
• Surface Temperature 14%
• Silicon Dioxide 14%
• Memory Performance 14%
• Semiconductor Manufacturing 14%
• Simulation Methodology 14%
• Annealing Simulation 14%
• Static Noise Margin 14%
• Induced Variability 14%
• Shallow Trench Isolation 14%
• Die Surface 14%
• Silicon Trenches 14%
• Chip Yield 14%
• Read Static Noise Margin 14%
• Transient Patterns 14%
• Chip Performance 14%
• Transistor Parameters 14%
• 7-nm FinFET 14%
• TFET SRAMs 14%

Engineering

• Rapid Thermal Annealing 100%
• Annealing Effect 100%
• Mitigation Strategy 28%
• Thermal Conductivity 28%
• Noise Margin 28%
• Fits and Tolerances 14%
• Transients 14%
• Semiconductor Manufacturing 14%
• Parameter Variation 14%
• Shallow Trench Isolation 14%
• Prior Art 14%
• Memory Performance 14%
• Silicon Dioxide 14%
• Emissivity 14%

Material Science

• Silicon 100%
• Transistor 66%
• Thermal Conductivity 66%
• Density 33%
• Silicon Dioxide 33%
• Annealing 33%
• Surface (Surface Science) 33%