Analysis of nanostructured coatings synthesized by ballistic impaction of nanoparticles

J. Hafiz; R. Mukherjee; X. Wang; J. V.R. Heberlein; P. H. McMurry; S. L. Girshick

doi:10.1016/j.tsf.2006.07.121

Analysis of nanostructured coatings synthesized by ballistic impaction of nanoparticles

J. Hafiz, R. Mukherjee, X. Wang, J. V.R. Heberlein, P. H. McMurry, S. L. Girshick

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline β-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates.

Original language	English (US)
Pages (from-to)	1147-1151
Number of pages	5
Journal	Thin Solid Films
Volume	515
Issue number	3
DOIs	https://doi.org/10.1016/j.tsf.2006.07.121
State	Published - Nov 23 2006

Bibliographical note

Funding Information:
This work was partially supported by the United States National Science Foundation, under award numbers DMI-0103169 and CTS-0506748, and IGERT award number DGE-0114372. The assistance of Joysurya Basu of the Characterization Facility during TEM operation, and John Thomas during Auger electron spectroscopy operation is gratefully acknowledged. We would also like to thank William Mook for the nanoindenation measurements.

Keywords

Aerosol sampling probe
Cubic SiC
Inertial impaction
Nanoparticle
Size distribution

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title = "Analysis of nanostructured coatings synthesized by ballistic impaction of nanoparticles",

abstract = "SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline β-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates.",

keywords = "Aerosol sampling probe, Cubic SiC, Inertial impaction, Nanoparticle, Size distribution",

author = "J. Hafiz and R. Mukherjee and X. Wang and Heberlein, {J. V.R.} and McMurry, {P. H.} and Girshick, {S. L.}",

note = "Funding Information: This work was partially supported by the United States National Science Foundation, under award numbers DMI-0103169 and CTS-0506748, and IGERT award number DGE-0114372. The assistance of Joysurya Basu of the Characterization Facility during TEM operation, and John Thomas during Auger electron spectroscopy operation is gratefully acknowledged. We would also like to thank William Mook for the nanoindenation measurements.",

year = "2006",

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doi = "10.1016/j.tsf.2006.07.121",

language = "English (US)",

volume = "515",

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AU - Hafiz, J.

AU - Mukherjee, R.

AU - Wang, X.

AU - Heberlein, J. V.R.

AU - McMurry, P. H.

AU - Girshick, S. L.

N1 - Funding Information: This work was partially supported by the United States National Science Foundation, under award numbers DMI-0103169 and CTS-0506748, and IGERT award number DGE-0114372. The assistance of Joysurya Basu of the Characterization Facility during TEM operation, and John Thomas during Auger electron spectroscopy operation is gratefully acknowledged. We would also like to thank William Mook for the nanoindenation measurements.

PY - 2006/11/23

Y1 - 2006/11/23

N2 - SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline β-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates.

AB - SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline β-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates.

KW - Aerosol sampling probe

KW - Cubic SiC

KW - Inertial impaction

KW - Nanoparticle

KW - Size distribution

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Analysis of nanostructured coatings synthesized by ballistic impaction of nanoparticles

Abstract

Bibliographical note

Keywords

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