Analysis of nanostructured coatings synthesized by ballistic impaction of nanoparticles

J. Hafiz, R. Mukherjee, X. Wang, J. V.R. Heberlein, P. H. McMurry, S. L. Girshick

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10 Scopus citations


SiC nanostructured coatings were synthesized by ballistic impaction of nanoparticles using a process called hypersonic plasma particle deposition (HPPD). X-ray diffraction spectra of typical samples showed the presence of crystalline SiC and Si. Grain sizes obtained through transmission electron microscopy showed particles in the sub 10 nm range with primarily crystalline β-SiC and some crystalline Si particles present. These results correlate well with particle size distributions measured using an aerosol sampling probe coupled to a scanning electrical mobility spectrometer. Interestingly, particle size distributions indicated only small changes in the particle size distributions when Si deposition was compared to SiC. Examination of adhesion characteristics highlighted the importance of a chemically bound interlayer during SiC deposition on Mo and steel substrates.

Original languageEnglish (US)
Pages (from-to)1147-1151
Number of pages5
JournalThin Solid Films
Issue number3
StatePublished - Nov 23 2006

Bibliographical note

Funding Information:
This work was partially supported by the United States National Science Foundation, under award numbers DMI-0103169 and CTS-0506748, and IGERT award number DGE-0114372. The assistance of Joysurya Basu of the Characterization Facility during TEM operation, and John Thomas during Auger electron spectroscopy operation is gratefully acknowledged. We would also like to thank William Mook for the nanoindenation measurements.


  • Aerosol sampling probe
  • Cubic SiC
  • Inertial impaction
  • Nanoparticle
  • Size distribution


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