Analysis of micromachined PZT membranes for MEMS power

J. H. Cho, M. J. Anderson, R. F. Richards, D. F. Bahr, C. D. Richards

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The performance of a piezoelectric generator in terms of the quality factor Q, the electromechanical coupling coefficient k2, and the efficiency were examined. The effect of design parameters such as membrane size, piezoelectric thickness, silicon thickness, and top electrode area are explored. The results show that both k2 and Q are sensitive to PZT thickness and electrode size.

Original languageEnglish (US)
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
EditorsM. Laudon, B. Romanowicz
Pages382-385
Number of pages4
StatePublished - Nov 2 2004
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: Mar 7 2004Mar 11 2004

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume1

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period3/7/043/11/04

Keywords

  • Efficiency
  • Electromechanical coupling coefficient
  • Mems power
  • Quality factor
  • pzt membrane

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