Analysis of carbon in SrTiO₃ grown by hybrid molecular beam epitaxy

Keyphrases

• Carbon Concentration 100%
• SrTiO3 100%
• Secondary Ion Mass Spectrometry 100%
• Hybrid Molecular Beam Epitaxy 100%
• Contamination Layer 100%
• Rutile 50%
• High Temperature 50%
• Growth Parameters 50%
• Strontium 50%
• RF Plasma 50%
• Growth Temperature 50%
• High Growth 50%
• Scanning Transmission Electron Microscopy 50%
• SrTiO3 Film 50%
• Plasma Sources 50%
• Low Carbon 50%
• Impurity Concentration 50%
• Pre-deposition 50%
• Organic Titanium 50%
• Carbon Impurity 50%
• Oxygen Plasma Cleaning 50%
• Effusion Cells 50%
• Metal-organic 50%

Material Science

• Molecular Beam Epitaxy 100%
• Film 100%
• Titanium 50%
• Secondary Ion Mass Spectrometry 50%
• Scanning Transmission Electron Microscopy 25%
• Strontium 25%