Analysis of carbon in SrTiO3 grown by hybrid molecular beam epitaxy

Bharat Jalan; Joël Cagnon; Thomas E. Mates; Susanne Stemmer

doi:10.1116/1.3253355

Analysis of carbon in SrTiO₃ grown by hybrid molecular beam epitaxy

Bharat Jalan
, Joël Cagnon
, Thomas E. Mates
, Susanne Stemmer

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

Secondary ion mass spectroscopy (SIMS) was used to investigate carbon impurity concentrations in stoichiometric SrTiO₃ films grown by a hybrid molecular beam epitaxy approach that uses an effusion cell to supply strontium, a rf plasma source for oxygen and a metal organic titanium source (titanium tetra isopropoxide). The carbon concentration in the films was measured as a function of growth parameters. At sufficiently high growth temperatures (>800 °C), the films contain a few ppm of carbon. The challenges in accurately quantifying low carbon concentrations are discussed. A carbon-containing contamination layer is detected on the surfaces of SrTiO ₃ substrates and air-exposed films by SIMS and in scanning transmission electron microscopy. The contamination layer could be removed by high-temperature predeposition oxygen plasma cleaning.

Original language	English (US)
Pages (from-to)	1365-1368
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	27
Issue number	6
DOIs	https://doi.org/10.1116/1.3253355
State	Published - 2009

Bibliographical note

Funding Information:
This research was supported by the National Science Foundation through the UCSB MRL (Award No. DMR 05-20415). Acquisition of the oxide MBE system was made possible through a NSF MRI grant (NSF Grant No. DMR-0619698).

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10.1116/1.3253355

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title = "Analysis of carbon in SrTiO3 grown by hybrid molecular beam epitaxy",

abstract = "Secondary ion mass spectroscopy (SIMS) was used to investigate carbon impurity concentrations in stoichiometric SrTiO3 films grown by a hybrid molecular beam epitaxy approach that uses an effusion cell to supply strontium, a rf plasma source for oxygen and a metal organic titanium source (titanium tetra isopropoxide). The carbon concentration in the films was measured as a function of growth parameters. At sufficiently high growth temperatures (>800 °C), the films contain a few ppm of carbon. The challenges in accurately quantifying low carbon concentrations are discussed. A carbon-containing contamination layer is detected on the surfaces of SrTiO 3 substrates and air-exposed films by SIMS and in scanning transmission electron microscopy. The contamination layer could be removed by high-temperature predeposition oxygen plasma cleaning.",

author = "Bharat Jalan and Jo{\"e}l Cagnon and Mates, \{Thomas E.\} and Susanne Stemmer",

note = "Funding Information: This research was supported by the National Science Foundation through the UCSB MRL (Award No. DMR 05-20415). Acquisition of the oxide MBE system was made possible through a NSF MRI grant (NSF Grant No. DMR-0619698).",

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T1 - Analysis of carbon in SrTiO3 grown by hybrid molecular beam epitaxy

AU - Jalan, Bharat

AU - Cagnon, Joël

AU - Mates, Thomas E.

AU - Stemmer, Susanne

N1 - Funding Information: This research was supported by the National Science Foundation through the UCSB MRL (Award No. DMR 05-20415). Acquisition of the oxide MBE system was made possible through a NSF MRI grant (NSF Grant No. DMR-0619698).

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N2 - Secondary ion mass spectroscopy (SIMS) was used to investigate carbon impurity concentrations in stoichiometric SrTiO3 films grown by a hybrid molecular beam epitaxy approach that uses an effusion cell to supply strontium, a rf plasma source for oxygen and a metal organic titanium source (titanium tetra isopropoxide). The carbon concentration in the films was measured as a function of growth parameters. At sufficiently high growth temperatures (>800 °C), the films contain a few ppm of carbon. The challenges in accurately quantifying low carbon concentrations are discussed. A carbon-containing contamination layer is detected on the surfaces of SrTiO 3 substrates and air-exposed films by SIMS and in scanning transmission electron microscopy. The contamination layer could be removed by high-temperature predeposition oxygen plasma cleaning.

AB - Secondary ion mass spectroscopy (SIMS) was used to investigate carbon impurity concentrations in stoichiometric SrTiO3 films grown by a hybrid molecular beam epitaxy approach that uses an effusion cell to supply strontium, a rf plasma source for oxygen and a metal organic titanium source (titanium tetra isopropoxide). The carbon concentration in the films was measured as a function of growth parameters. At sufficiently high growth temperatures (>800 °C), the films contain a few ppm of carbon. The challenges in accurately quantifying low carbon concentrations are discussed. A carbon-containing contamination layer is detected on the surfaces of SrTiO 3 substrates and air-exposed films by SIMS and in scanning transmission electron microscopy. The contamination layer could be removed by high-temperature predeposition oxygen plasma cleaning.

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