Abstract
In this paper, the authors investigate the impact of device interconnect parasitics on the two most commonly-accepted RF small-signal figures-of-merit, the transit frequency (fT) and the maximum frequency of oscillation (fmax) in state-of-the-art SiGe HBT technology. Simulations and measurement results are provided as a guideline to design an optimum device interconnect scheme to achieve a high fmax. Test structures were characterized with de-embedding structures providing reference planes at the device level and at the top-metal level. Measurements show an fmax of 450 GHz at the device level and at the top-metal level a degradation of only 4% to 430 GHz. These results demonstrate a significant advantage of the SiGe HBT technology compared to ultra-scaled CMOS technology at device speeds approaching a terahertz, and to the best of the authors' knowledge, demonstrate the highest fmax reported at the top-metal level in any state-of-the-art silicon technology.
| Original language | English (US) |
|---|---|
| Title of host publication | 2014 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 211-214 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781479972302 |
| DOIs | |
| State | Published - Dec 9 2014 |
| Externally published | Yes |
| Event | 2014 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2014 - Coronado, United States Duration: Sep 28 2014 → Oct 1 2014 |
Publication series
| Name | Proceedings of the IEEE Bipolar/BiCMOS Circuits and Technology Meeting |
|---|---|
| ISSN (Print) | 1088-9299 |
Conference
| Conference | 2014 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, BCTM 2014 |
|---|---|
| Country/Territory | United States |
| City | Coronado |
| Period | 9/28/14 → 10/1/14 |
Bibliographical note
Publisher Copyright:© 2014 IEEE.
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