TY - JOUR
T1 - An implicit algorithm to simulate reaction chemistry in a plasma
AU - George, C.
AU - Candler, G.
AU - Pfender, E.
PY - 1998/9/21
Y1 - 1998/9/21
N2 - In an effort to establish the optimum conditions for depositing high-quality diamond films at high deposition rates using a plasma torch, modelling work has been focused on developing a realistic model for determining temperature, velocity and particle density distributions in the plasma jet. To enhance molecular decomposition, which favourably improves diamond synthesis, high-speed gas is passed through a supersonic anode nozzle. In the subsequent low-pressure chamber, the chemical reactions cannot follow the fast macroscopic translation, resulting in distributions of dissociated precursors that are far from chemical equilibrium. To simulate the finite rate chemistry, a generalized implicit multi-component algorithm is introduced and examined in the context of a two-dimensional computational model of a chemically reacting Ar-H2 supersonic plasma jet. The scheme can be adapted to other plasma flows in which chemical non-equilibrium is encountered.
AB - In an effort to establish the optimum conditions for depositing high-quality diamond films at high deposition rates using a plasma torch, modelling work has been focused on developing a realistic model for determining temperature, velocity and particle density distributions in the plasma jet. To enhance molecular decomposition, which favourably improves diamond synthesis, high-speed gas is passed through a supersonic anode nozzle. In the subsequent low-pressure chamber, the chemical reactions cannot follow the fast macroscopic translation, resulting in distributions of dissociated precursors that are far from chemical equilibrium. To simulate the finite rate chemistry, a generalized implicit multi-component algorithm is introduced and examined in the context of a two-dimensional computational model of a chemically reacting Ar-H2 supersonic plasma jet. The scheme can be adapted to other plasma flows in which chemical non-equilibrium is encountered.
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U2 - 10.1088/0022-3727/31/18/012
DO - 10.1088/0022-3727/31/18/012
M3 - Article
AN - SCOPUS:0032163512
SN - 0022-3727
VL - 31
SP - 2269
EP - 2280
JO - Journal Physics D: Applied Physics
JF - Journal Physics D: Applied Physics
IS - 18
ER -