An environmentally responsive microflow controller with double side tethered structure for the entrapment of hydrogel

Antonio Baldi, Ming Lei, Yuandong Gu, Ronald A. Siegel, Babak Ziaie

Research output: Contribution to conferencePaperpeer-review

6 Scopus citations

Abstract

In this paper, we report on the fabrication and characterization of a new hydrogel-based microflow controller (HFC). The basic HFC structure is a silicon membrane having an array of orifices with an internal structure designed to confine the hydrogel while allowing it to control the flow across the membrane. Each orifice (140 μm diameter) in the membrane has a central post held by two sets of tethers on each side. The hydrogel polymerized inside such orifices contracts around the post in the shrunken state, allowing the pass of fluid through the perimeter. In the swollen state, the hydrogel occupies the whole volume of the orifice completely blocking the flow. Fabrication of the structure involve a combination of deep trench etch and KOH etch. Two different hydrogels. temperature-sensitive and glucose-sensitive, have been tested in the HFC. The measured response times were 10 seconds and 10 minutes respectively.

Original languageEnglish (US)
Pages84-87
Number of pages4
StatePublished - Jul 23 2003
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: Jan 19 2003Jan 23 2003

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period1/19/031/23/03

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