@inproceedings{524c62844acd4ef883781c3a7d2fb6a7,
title = "An array-based circuit for characterizing latent Plasma-Induced Damage",
abstract = "An array-based Plasma-Induced Damage (PID) characterization circuit with various antenna structures is proposed for efficient collection of massive PID breakdown statistics. The proposed circuit reduces the stress time and test area by a factor proportional to the number of Devices Under Test (DUTs). Measured Weibull statistics from a 12-24 array implemented in 65nm show that DUTs with plate type antennas have a shorter lifetime compared to their fork type counterparts suggesting greater PID effect during the plasma ashing process.",
keywords = "Aging, Plasma-induced damage, Time dependent dielectric breakdown, degradation",
author = "Choi, {Won Ho} and Pulkit Jain and Kim, {Chris H.}",
year = "2013",
month = aug,
day = "7",
doi = "10.1109/IRPS.2013.6532005",
language = "English (US)",
isbn = "9781479901135",
series = "IEEE International Reliability Physics Symposium Proceedings",
booktitle = "2013 IEEE International Reliability Physics Symposium, IRPS 2013",
note = "2013 IEEE International Reliability Physics Symposium, IRPS 2013 ; Conference date: 14-04-2013 Through 18-04-2013",
}