Alteration by repeated electrostatic MEMS actuation of the thermoluminescence of thin films

Merlin L. Mah, Philip R. Armstrong, Joseph J. Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.

Original languageEnglish (US)
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages55-56
Number of pages2
DOIs
StatePublished - Dec 1 2013
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: Aug 18 2013Aug 22 2013

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Country/TerritoryJapan
CityKanazawa
Period8/18/138/22/13

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