TY - GEN
T1 - Alteration by repeated electrostatic MEMS actuation of the thermoluminescence of thin films
AU - Mah, Merlin L.
AU - Armstrong, Philip R.
AU - Talghader, Joseph J.
PY - 2013/12/1
Y1 - 2013/12/1
N2 - The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.
AB - The thermoluminescence characteristics of a thin film of terbium-doped yttrium oxide change upon repeated stress application through electrostatic actuation. A maximum 42% decrease in the intensity of two thermoluminescent peaks is seen when voltage is applied in 5V increments to 25V, translating to 0.15 μm of center deflection. While the overall intensity decreases, the higher temperature peak - corresponding to deeper traps - is affected more than the lower temperature one. Two possible physical explanations for the behavior are mechanical stress and dielectric charging.
UR - http://www.scopus.com/inward/record.url?scp=84892168332&partnerID=8YFLogxK
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U2 - 10.1109/OMN.2013.6659056
DO - 10.1109/OMN.2013.6659056
M3 - Conference contribution
AN - SCOPUS:84892168332
SN - 9781479915125
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 55
EP - 56
BT - Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
T2 - 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
Y2 - 18 August 2013 through 22 August 2013
ER -