Aerosol processing for nanomanufacturing

Steven L. Girshick

Research output: Contribution to journalArticlepeer-review

33 Scopus citations


Advances in nanoparticle synthesis are opening new opportunities for a broad variety of technologies that exploit the special properties of matter at the nanoscale. To realize this potential will require the development of new technologies for processing nanoparticles, so as to utilize them in a manufacturing context. Two important classes of such processing technologies include the controlled deposition of nanoparticles onto surfaces, and the application of chemically specific coatings onto individual nanoparticles, so as to either passivate or functionalize their surfaces. This paper provides an overview of three technologies related to these objectives, with an emphasis on aerosol-based methods: first, the deposition of nanoparticles by hypersonic impaction, so as so spray-coat large areas with nanoparticles; second, the use of aerodynamic lenses to produce focused beams of nanoparticles, with beam widths of a few tens of microns, so as to integrate nanoparticle-based structures into microelectromechanical systems; and third, the coating of individual nanoparticles by means of photoinduced chemical vapor deposition (photo-CVD), driven by excimer lamps. We also discuss the combination of these technologies, so that nanoparticle synthesis, together with multiple processing steps, can be accomplished in a single flow stream.

Original languageEnglish (US)
Pages (from-to)935-945
Number of pages11
JournalJournal of Nanoparticle Research
Issue number6
StatePublished - Aug 2008

Bibliographical note

Funding Information:
Fig. 12 Illustration of hypothetical integrated nanoparticle process stream, including nanoparticle synthesis, nanoparticle coating by photo-CVD, nanoparticle focusing by aerodynamic lenses, and deposition of nanoparticles to form micropatterns Acknowledgments The author acknowledges the assistance of A. Beaber, who contributed recent unpublished results on the HPPD process, shown in Figures 2 and 3 and discussed in the accompanying text.This research was partially supported by the National Science Foundation under grants CTS-0506748 and CBET-0730184, by the Army Research Office under grant DAAD-190110503, and by the Minnesota Supercomputing Institute. Use of facilities of the Minnesota Nanotechnology Cluster (MINTEC) is gratefully acknowledged.


  • Focused particle beams
  • Hypersonic plasma particle deposition
  • Nanomanufacturing
  • Nanoparticle coating
  • Processing
  • Synthesis


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