AEROSOL CHARGING AND NEUTRALIZATION AND ELECTROSTATIC DISCHARGE IN CLEAN ROOMS.

Benjamin Y.H. Liu, David Y Pui, Warren O. Kinstley, Wayne G. Fisher

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

This paper describes the role of electrical charge on particle transport and deposition and the neutralization of particle electrostatic charge by ionized air. The level of electical charge on airborne particles and the rate of charge neutralization by bipolar ions have been reviewed and the effect of charge on particle deposition on semiconductor wafers discussed. Finally, the use of high voltage ionizers for electrostatic control in clean rooms is discussed.

Original languageEnglish (US)
Pages (from-to)42-46
Number of pages5
JournalJournal of Environmental Sciences
Volume30
Issue number2
StatePublished - Mar 1 1987

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