Abstract
Instruments for airborne particle sampling and measurement are important tools for the study of particulate air contaminants. As such they are important in air quality, air pollution and industrial hygiene studies. Particle measuring instruments are important also for various industrial processes, such as clean room monitoring and contaminant measurement in clean process gases used in semiconductor manufacturing. This paper reviews the advances in particle measuring and sampling instruments, with particular emphasis on instruments for atmospheric studies. Devices for particle generation needed for instrument calibration and experimental purposes are also covered in this review.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 252-269 |
| Number of pages | 18 |
| Journal | Physica Scripta |
| Volume | 37 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 1 1988 |