Abstract
Secondary ion mass spectrometry, x-ray photoelectron spectroscopy, electron energy-loss spectroscopy, x-ray diffraction, transmission electron microscopy, and 15N hydrogen profiling have been used to characterize rf sputter-deposited tin oxide thin films (1500-2500Å) before and after immersion in aqueous solutions to determine the extent of film hydration and ion exchange actlvity. The results support a model in which the tin oxide film is comprised of microcrystalline, colloidlike particles or grains (200-300Å), the ion exchange sites being located on the hydroxylated grain surfaces. The uptake of Na+ in the bulk film increases sharply at a pH = 3-5 corresponding to literature values for the isoelectric point of Sn02.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 941-943 |
| Number of pages | 3 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 5 |
| Issue number | 4 |
| DOIs | |
| State | Published - Jul 1 1987 |