We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of mechanical beam.
Bibliographical noteFunding Information:
This work was supported by a seedling program from DARPA/MTO (Award No.W911NF-09-1-410) and the DARPA/MTO ORCHID program through a grant from AFOSR (Award No.FA9550-10-1-0297). W.H.P. Pernice would like to thank the Alexander-von-Humboldt foundation for providing a postdoctoral fellowship. H.X.T acknowledges support from a Packard Fellowship in Science and Engineering and a CAREER award from the National Science Foundation. We thank Yale School of Engineering and Applied Sciences cleanroom managed by Michael Power. The project makes use of electron beam lithography facilities at Brookhaven national laboratory, which is supported by the U.S. Department of Energy, Office of Basic Energy Sciences, under Contract No. DE-AC02-98CH10886.