Adhesion energy in nanogap InPInGaAs microcantilevers

Jan D. Makowski, Anand S. Gawarikar, Joseph J. Talghader

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Abstract

The adhesion energy is measured between InGaAs quantum wells that have collapsed across a 125 nm air gap in an InPInGaAs heterostructure. The method relies on measuring the unadhered length and shape of collapsed microcantilevers with optical interferometry. The adhesion energy is found to be 72±16 mJ m-2. Since the air gap is much smaller than has been measured previously, the influence of van der Waals forces across the gap was included in theoretical modeling. It was found that the forces should not cause significant deviation from the standard adhesion models unless the adhesion energy drops below 25 mJ m-2.

Original languageEnglish (US)
Article number243508
JournalApplied Physics Letters
Volume89
Issue number24
DOIs
StatePublished - 2006

Bibliographical note

Funding Information:
The authors would like to thank Chris Palmstrøm and Sukgeun Choi, University of Minnesota and Jin Dong Song, KIST for MBE growth. This work was sponsored by the University of Minnesota and the National Science Foundation under Grant No. ECS-0631241.

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