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Adhesion and fracture of tantalum nitride films

  • N. R. Moody
  • , R. Q. Hwang
  • , S. Venka-Taraman
  • , J. E. Angelo
  • , D. P. Norwood
  • , William W Gerberich

Research output: Contribution to journal › Article › peer-review

77   Link opens in a new tab Scopus citations

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Material Science