Active microcantilevers based on piezoresistive ferromagnetic thin films

Keyphrases

• Piezoresistive 100%
• Piezoresistivity 100%
• Active Microcantilever 100%
• Ferromagnetic Thin Film 100%
• Microcantilever 50%
• Actuation 50%
• Magnetic Thin Films 50%
• Deflection 50%
• Self-sensing 50%
• Piezoelectric Stack 50%
• Bilayer Structure 50%
• Ferromagnetic Properties 50%
• Active Cantilever 50%
• Self-actuation 50%
• Cantilever Sensor 50%
• Magnetostrictive Properties 50%
• Micromechanical Systems 50%

Engineering

• Microcantilevers 100%
• Thin Films 100%
• Piezoelectric Stack 33%
• Actuation 33%

Material Science

• Thin Films 100%
• Piezoelectricity 50%
• Magnetic Thin Films 50%
• Film 50%