Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran; Mo Li; Daniel Garcia-Sanchez; Peng Zhao; Ichiro Takeuchi; Hong X. Tang

doi:10.1063/1.3533390

Active microcantilevers based on piezoresistive ferromagnetic thin films

Harish Bhaskaran
, Mo Li
, Daniel Garcia-Sanchez
, Peng Zhao
, Ichiro Takeuchi
, Hong X. Tang

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

We report the piezoresistivity in magnetic thin films of Fe_0.7 Ga_0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe_0.7 Ga _0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

Original language	English (US)
Article number	013502
Journal	Applied Physics Letters
Volume	98
Issue number	1
DOIs	https://doi.org/10.1063/1.3533390
State	Published - Jan 3 2011

Bibliographical note

Funding Information:
The authors acknowledge funding from DARPA/DSO’s HUMS project under Grant No. FA8650-09-C-1-7944.

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10.1063/1.3533390

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title = "Active microcantilevers based on piezoresistive ferromagnetic thin films",

abstract = "We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.",

author = "Harish Bhaskaran and Mo Li and Daniel Garcia-Sanchez and Peng Zhao and Ichiro Takeuchi and Tang, \{Hong X.\}",

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AU - Li, Mo

AU - Garcia-Sanchez, Daniel

AU - Zhao, Peng

AU - Takeuchi, Ichiro

AU - Tang, Hong X.

N1 - Funding Information: The authors acknowledge funding from DARPA/DSO’s HUMS project under Grant No. FA8650-09-C-1-7944.

PY - 2011/1/3

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N2 - We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

AB - We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.

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Active microcantilevers based on piezoresistive ferromagnetic thin films

Abstract

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