We report the piezoresistivity in magnetic thin films of Fe0.7 Ga0.3 and their use for fabricating self-transducing microcantilevers. The actuation occurs as a consequence of both the ferromagnetic and magnetostrictive properties of Fe0.7 Ga 0.3 thin films, while the deflection readout is achieved by exploiting the piezoresistivity of these films. This self-sensing self-actuating micromechanical system involves a very simple bilayer structure, which eliminates the need for the more complex piezoelectric stack that is commonly used in active cantilevers. Thus, it potentially opens opportunities for remotely actuated cantilever-based sensors.
|Original language||English (US)|
|Journal||Applied Physics Letters|
|State||Published - Jan 3 2011|
Bibliographical noteFunding Information:
The authors acknowledge funding from DARPA/DSO’s HUMS project under Grant No. FA8650-09-C-1-7944.