Abstraction of hydrogen by SiH₃ from hydrogen-terminated Si(001)-(2 × 1) surfaces

Keyphrases

• Activation Energy Barrier 33%
• Classical Molecular Dynamics Simulations 33%
• Classical Potential 33%
• Cluster Model 33%
• Dangling Bonds 33%
• Density Functional Theory 33%
• Eley-Rideal Reaction 33%
• Exothermic Reaction 33%
• Gas Phase 33%
• H-abstraction Reaction 33%
• Hydrogen Atom 33%
• Hydrogen-terminated 100%
• Hydrogenated Amorphous Silicon 33%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 33%
• Pseudopotential Calculations 33%
• Reaction Energy 33%
• SiH3 100%
• Silane Molecule 33%
• Silicon Deposition 33%

Chemistry

• Amorphous Silicon 33%
• Cluster Model 33%
• Dangling Bond 33%
• Density Functional Theory 33%
• Energetics 66%
• Energy Barrier 33%
• Exothermic Reaction 33%
• Hydrogen 100%
• Molecular Dynamics Simulation 33%
• Pseudopotential 33%
• Reaction Activation Energy 33%
• Silane 33%