Absolute densities of N and excited N2 in a N2 plasma

Sumit Agarwal; Bram Hoex; M. C M Van De Sanden; Dimitrios Maroudas; Eray S. Aydil

doi:10.1063/1.1630843

Absolute densities of N and excited N₂ in a N₂ plasma

Sumit Agarwal, Bram Hoex, M. C M Van De Sanden, Dimitrios Maroudas, Eray S. Aydil

Chemical Engineering and Materials Science

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Abstract

Today, there is a need to simultaneously characterize the N and N*₂ fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*₂ in an N₂ plasma.

Original language	English (US)
Pages (from-to)	4918-4920
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	24
DOIs	https://doi.org/10.1063/1.1630843
State	Published - Dec 15 2003

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title = "Absolute densities of N and excited N2 in a N2 plasma",

abstract = "Today, there is a need to simultaneously characterize the N and N*2 fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*2 in an N2 plasma.",

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AU - Hoex, Bram

AU - Van De Sanden, M. C M

AU - Maroudas, Dimitrios

AU - Aydil, Eray S.

PY - 2003/12/15

Y1 - 2003/12/15

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AB - Today, there is a need to simultaneously characterize the N and N*2 fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*2 in an N2 plasma.

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Absolute densities of N and excited N₂ in a N₂ plasma

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