Absolute densities of N and excited N2 in a N2 plasma

Sumit Agarwal, Bram Hoex, M. C M Van De Sanden, Dimitrios Maroudas, Eray S. Aydil

Research output: Contribution to journalArticlepeer-review

61 Scopus citations

Abstract

Today, there is a need to simultaneously characterize the N and N*2 fluxes impinging on the substrate to determine the role of precursors during deposition. An overview is given on the use of modulated-beam light-of-sight threshold ionization mass spectrometry (LOS-TIMS) to measure the absolute densities of N and N*2 in an N2 plasma.

Original languageEnglish (US)
Pages (from-to)4918-4920
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number24
DOIs
StatePublished - Dec 15 2003

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