A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Min Woo Jang; Chia Ling Chen; Walter E. Partlo; Shruti R. Patil; Dongjin Lee; Zhijiang Ye; David Lilja; T. Andrew Taton; Tianhong Cui; Stephen A. Campbell

doi:10.1109/TRANSDUCERS.2011.5969607

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Min Woo Jang
, Chia Ling Chen
, Walter E. Partlo
, Shruti R. Patil
, Dongjin Lee
, Zhijiang Ye
, David Lilja
, T. Andrew Taton
, Tianhong Cui
, Stephen A. Campbell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.

Original language	English (US)
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1705-1708
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969607
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: Jun 5 2011 → Jun 9 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	6/5/11 → 6/9/11

Keywords

3-terminal fixed-fixed beam switch
All-SWNT thin film
Layer-by-layer assembly

Publisher link

10.1109/TRANSDUCERS.2011.5969607

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Jang, M. W., Chen, C. L., Partlo, W. E., Patil, S. R., Lee, D., Ye, Z., Lilja, D., Taton, T. A., Cui, T., & Campbell, S. A. (2011). A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1705-1708). Article 5969607 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969607

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. / Jang, Min Woo; Chen, Chia Ling; Partlo, Walter E. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708 5969607 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jang, MW, Chen, CL, Partlo, WE, Patil, SR, Lee, D, Ye, Z, Lilja, D, Taton, TA, Cui, T & Campbell, SA 2011, A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969607, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1705-1708, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969607

Jang MW, Chen CL, Partlo WE, Patil SR, Lee D, Ye Z et al. A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708. 5969607. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969607

Jang, Min Woo ; Chen, Chia Ling ; Partlo, Walter E. et al. / A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1705-1708 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

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abstract = "An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75\% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.",

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A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

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Keywords

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