A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications

Min Woo Jang, Chia Ling Chen, Walter E. Partlo, Shruti R. Patil, Dongjin Lee, Zhijiang Ye, David Lilja, T. Andrew Taton, Tianhong Cui, Stephen A. Campbell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.

Original languageEnglish (US)
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages1705-1708
Number of pages4
DOIs
StatePublished - Sep 1 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: Jun 5 2011Jun 9 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Other

Other2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
CountryChina
CityBeijing
Period6/5/116/9/11

Fingerprint

Single-walled carbon nanotubes (SWCN)
MEMS
Copolymers
Switches
Thin films
Composite films
Self assembly
Film thickness
Electric properties
Heat treatment

Keywords

  • 3-terminal fixed-fixed beam switch
  • All-SWNT thin film
  • Layer-by-layer assembly

Cite this

Jang, M. W., Chen, C. L., Partlo, W. E., Patil, S. R., Lee, D., Ye, Z., ... Campbell, S. A. (2011). A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1705-1708). [5969607] (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969607

A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. / Jang, Min Woo; Chen, Chia Ling; Partlo, Walter E.; Patil, Shruti R.; Lee, Dongjin; Ye, Zhijiang; Lilja, David; Taton, T. Andrew; Cui, Tianhong; Campbell, Stephen A.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708 5969607 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Jang, MW, Chen, CL, Partlo, WE, Patil, SR, Lee, D, Ye, Z, Lilja, D, Taton, TA, Cui, T & Campbell, SA 2011, A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969607, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1705-1708, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 6/5/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969607
Jang MW, Chen CL, Partlo WE, Patil SR, Lee D, Ye Z et al. A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1705-1708. 5969607. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969607
Jang, Min Woo ; Chen, Chia Ling ; Partlo, Walter E. ; Patil, Shruti R. ; Lee, Dongjin ; Ye, Zhijiang ; Lilja, David ; Taton, T. Andrew ; Cui, Tianhong ; Campbell, Stephen A. / A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. pp. 1705-1708 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).
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