A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage

Won Ho Choi; Saroj Satapathy; John Keane; Chris H. Kim

doi:10.1109/CICC.2014.6945996

A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage

Won Ho Choi, Saroj Satapathy, John Keane, Chris H. Kim

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

We propose a test circuit for characterizing Plasma-Induced Damage (PID) based on a ring oscillator array for collecting high-quality BTI statistics. Two types of ring oscillators, PID protected and PID damaged, with built-in antenna structures were designed to separate PID from other effects. A beat frequency (BF) detection scheme was adopted to achieve high frequency measurement precision (>0.01%) in a short measurement time (>1μs) to prevent unwanted BTI recovery. The proposed circuit enables accurate PID-induced BTI lifetime prediction with different Antenna Ratios (ARs) in any type of device with any topology of antenna structure under any fabrication process. Measured frequency statistics from a 65nm test chip shows a 1.15% shift in the average frequency as a result of PID.

Original language	English (US)
Title of host publication	Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479932863
DOIs	https://doi.org/10.1109/CICC.2014.6945996
State	Published - Nov 4 2014
Event	36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014 - San Jose, United States Duration: Sep 15 2014 → Sep 17 2014

Publication series

Name	Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014

Other

Other	36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014
Country/Territory	United States
City	San Jose
Period	9/15/14 → 9/17/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

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10.1109/CICC.2014.6945996

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Choi, W. H., Satapathy, S., Keane, J., & Kim, C. H. (2014). A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage. In Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014 Article 6945996 (Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CICC.2014.6945996

A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage. / Choi, Won Ho; Satapathy, Saroj; Keane, John et al.
Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 6945996 (Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Choi, WH, Satapathy, S, Keane, J & Kim, CH 2014, A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage. in Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014., 6945996, Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014, Institute of Electrical and Electronics Engineers Inc., 36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014, San Jose, United States, 9/15/14. https://doi.org/10.1109/CICC.2014.6945996

Choi WH, Satapathy S, Keane J, Kim CH. A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage. In Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014. Institute of Electrical and Electronics Engineers Inc. 2014. 6945996. (Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014). doi: 10.1109/CICC.2014.6945996

Choi, Won Ho ; Satapathy, Saroj ; Keane, John et al. / A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage. Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. (Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014).

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abstract = "We propose a test circuit for characterizing Plasma-Induced Damage (PID) based on a ring oscillator array for collecting high-quality BTI statistics. Two types of ring oscillators, PID protected and PID damaged, with built-in antenna structures were designed to separate PID from other effects. A beat frequency (BF) detection scheme was adopted to achieve high frequency measurement precision (>0.01%) in a short measurement time (>1μs) to prevent unwanted BTI recovery. The proposed circuit enables accurate PID-induced BTI lifetime prediction with different Antenna Ratios (ARs) in any type of device with any topology of antenna structure under any fabrication process. Measured frequency statistics from a 65nm test chip shows a 1.15% shift in the average frequency as a result of PID.",

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A test circuit based on a ring oscillator array for statistical characterization of Plasma-Induced Damage

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