A technique for the linearization of voltage contrast in the scanning electron microscope

A. Gopinath, C. C. Sanger

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

A technique for the linearization of voltage contrast in the scanning electron microscope is outlined using a target cage arrangement in conjunction with a feedback loop. Experimental results on a GaAs transverse device are presented.

Original languageEnglish (US)
Article number027
Pages (from-to)334-336
Number of pages3
JournalJournal of Physics E: Scientific Instruments
Volume4
Issue number4
DOIs
StatePublished - Dec 1 1971

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