Abstract
A technique for the linearization of voltage contrast in the scanning electron microscope is outlined using a target cage arrangement in conjunction with a feedback loop. Experimental results on a GaAs transverse device are presented.
| Original language | English (US) |
|---|---|
| Article number | 027 |
| Pages (from-to) | 334-336 |
| Number of pages | 3 |
| Journal | Journal of Physics E: Scientific Instruments |
| Volume | 4 |
| Issue number | 4 |
| DOIs | |
| State | Published - Dec 1 1971 |