A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

Marco Battaglia; Devis Contarato; Piero Giubilato; Leo Greiner; Lindsay Glesener; Benjamin Hooberman

doi:10.1016/j.nima.2007.05.276

A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

Marco Battaglia
, Devis Contarato
, Piero Giubilato
, Leo Greiner
, Lindsay Glesener
, Benjamin Hooberman

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

This paper reports results of a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning to 50 and 40 μ m. This study shows that neither their noise nor their response to ionising particles has been degraded by the thinning process. The thinned chips have been used to build a pixel beam telescope for the ALS 1.5 GeV e^- beam test facility. After alignment, an extrapolation resolution better than 9 μ m has been measured for a configuration of four equally spaced pixel detector planes.

Original language	English (US)
Pages (from-to)	675-679
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	579
Issue number	2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.nima.2007.05.276
State	Published - Sep 1 2007
Externally published	Yes

Bibliographical note

Funding Information:
We thank Marc Winter and Frank Gaede for discussion and Robert Foglia, of Aptek Industries, for assistance with the back-thinning process. This work was supported by the Director, Office of Science, of the US Department of Energy under Contract no. DE-AC02-05CH11231 and used resources of the National Energy Research Scientific Computing Center, supported under Contract no. DE-AC03-76SF00098. We are indebted to the staff of the LBNL Advanced Light Source for their help and the excellent performance of the machine.

Keywords

ILC
Monolithic pixel sensors

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10.1016/j.nima.2007.05.276

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Battaglia, M., Contarato, D., Giubilato, P., Greiner, L., Glesener, L., & Hooberman, B. (2007). A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 579(2 SPEC. ISS.), 675-679. https://doi.org/10.1016/j.nima.2007.05.276

A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope. / Battaglia, Marco; Contarato, Devis; Giubilato, Piero et al.
In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 579, No. 2 SPEC. ISS., 01.09.2007, p. 675-679.

Research output: Contribution to journal › Article › peer-review

Battaglia, M, Contarato, D, Giubilato, P, Greiner, L, Glesener, L & Hooberman, B 2007, 'A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope', Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 579, no. 2 SPEC. ISS., pp. 675-679. https://doi.org/10.1016/j.nima.2007.05.276

Battaglia M, Contarato D, Giubilato P, Greiner L, Glesener L, Hooberman B. A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2007 Sep 1;579(2 SPEC. ISS.):675-679. doi: 10.1016/j.nima.2007.05.276

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A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

Abstract

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