A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

Marco Battaglia, Devis Contarato, Piero Giubilato, Leo Greiner, Lindsay Glesener, Benjamin Hooberman

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19 Scopus citations


This paper reports results of a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning to 50 and 40 μ m. This study shows that neither their noise nor their response to ionising particles has been degraded by the thinning process. The thinned chips have been used to build a pixel beam telescope for the ALS 1.5 GeV e- beam test facility. After alignment, an extrapolation resolution better than 9 μ m has been measured for a configuration of four equally spaced pixel detector planes.

Original languageEnglish (US)
Pages (from-to)675-679
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number2 SPEC. ISS.
StatePublished - Sep 1 2007
Externally publishedYes

Bibliographical note

Funding Information:
We thank Marc Winter and Frank Gaede for discussion and Robert Foglia, of Aptek Industries, for assistance with the back-thinning process. This work was supported by the Director, Office of Science, of the US Department of Energy under Contract no. DE-AC02-05CH11231 and used resources of the National Energy Research Scientific Computing Center, supported under Contract no. DE-AC03-76SF00098. We are indebted to the staff of the LBNL Advanced Light Source for their help and the excellent performance of the machine.


  • ILC
  • Monolithic pixel sensors


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