Fingerprint
Dive into the research topics of 'A study of CVD growth kinetics and film microstructure of zirconium dioxide from zirconium tetra-tert-butoxide'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
A study of CVD growth kinetics and film microstructure of zirconium dioxide from zirconium tetra-tert-butoxide
David J. Burleson, Jeffrey T. Roberts, Wayne L. Gladfelter, Stephen A. Campbell, Ryan C. Smith
Research output: Contribution to journal › Article › peer-review
35
Scopus
citations