A sonic jet bipolar ionizer has been designed and tested. Ion production rates and characteristics of particulate contaminants were studied as a function of design parameters (i.e., electrode material, and orifice plate material) and of operating conditions (i.e., electrode to orifice distance, pressure, electrode voltage). In the optimized design particle generation by electrode or plate sputtering was eliminated, while particle generation by chemical reaction and subsequent gas to particle conversion was reduced to low levels. The ionizer provided a high output of bipolar ions at rates that ensured balanced operation and low charge neutralization times. An aerosol neutralizer using the corona ionizer was designed and tested with singly charged monodisperse aerosols. The equilibrium charge distribution of the aerosol was measured using an electrical mobility classification technique, and was found to be in good agreement with theoretical predictions.
Bibliographical noteFunding Information:
This research is supported under a grant by the Particulate Contamination Control Research Consortium at the University of Minnesota. Members of the Research Consortium include Applied Materials, FSI International, GM/Delco Electronics, IBM Corporation, Mil-lipore Corporation, Nupro Co., and TSI, Inc. The support of the Consortium is gratefully acknowledged.