Abstract
Sampling circuitry on the lines of that in a sampling oscilloscope has been interfaced with a scanning electron microscope (SEM). This sampling SEM allows the examination of very fast, repetitive voltage waveforms with rise times of the order of 200 ps or less.
| Original language | English (US) |
|---|---|
| Article number | 014 |
| Pages (from-to) | 229-233 |
| Number of pages | 5 |
| Journal | Journal of Physics E: Scientific Instruments |
| Volume | 11 |
| Issue number | 3 |
| DOIs | |
| State | Published - Dec 1 1978 |