A sampling scanning electron microscope

K. G. Gopinathan, A. Gopinath

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Sampling circuitry on the lines of that in a sampling oscilloscope has been interfaced with a scanning electron microscope (SEM). This sampling SEM allows the examination of very fast, repetitive voltage waveforms with rise times of the order of 200 ps or less.

Original languageEnglish (US)
Article number014
Pages (from-to)229-233
Number of pages5
JournalJournal of Physics E: Scientific Instruments
Volume11
Issue number3
DOIs
StatePublished - Dec 1 1978

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