The electrical and physical properties of pure single-walled carbon nanotube thin films deposited through a layer-by-layer-self-assembly process are discussed. The film thickness was proportional to the number of dipping cycles. The film resistivity was estimated as 2.19× 10-3ω cm after thermal treatment processes were performed. The estimated specific contact resistance to gold electrodes was 6.33× 10-9 ωm 2 from contact chain measurements. The fabricated three-terminal microelectromechanical switch using these films functioned as a beam for multiple switching cycles with a 4.5 V pull-in voltage. This switch is believed to be a promising device for low power digital logic applications.
Bibliographical noteFunding Information:
This work was partially supported by the DARPA NEMS Program. We also acknowledge the fabrication and characterization assistance at the Nanofabrication Center and the Characterization Facility at the University of Minnesota, which are supported by NSF through NNIN.
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