A pure single-walled carbon nanotube thin film based three-terminal microelectromechanical switch

Min Woo Jang, Chia Ling Chen, Walter E. Partlo, Shruti R. Patil, Dongjin Lee, Zhijang Ye, David Lilja, T. Andrew Taton, Tianhong Cui, Stephen A. Campbell

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Abstract

The electrical and physical properties of pure single-walled carbon nanotube thin films deposited through a layer-by-layer-self-assembly process are discussed. The film thickness was proportional to the number of dipping cycles. The film resistivity was estimated as 2.19× 10-3ω cm after thermal treatment processes were performed. The estimated specific contact resistance to gold electrodes was 6.33× 10-9 ωm 2 from contact chain measurements. The fabricated three-terminal microelectromechanical switch using these films functioned as a beam for multiple switching cycles with a 4.5 V pull-in voltage. This switch is believed to be a promising device for low power digital logic applications.

Original languageEnglish (US)
Article number073502
JournalApplied Physics Letters
Volume98
Issue number7
DOIs
StatePublished - Feb 14 2011

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