A pure single-walled carbon nanotube thin film based three-terminal microelectromechanical switch

Min Woo Jang, Chia Ling Chen, Walter E. Partlo, Shruti R. Patil, Dongjin Lee, Zhijang Ye, David Lilja, T. Andrew Taton, Tianhong Cui, Stephen A. Campbell

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The electrical and physical properties of pure single-walled carbon nanotube thin films deposited through a layer-by-layer-self-assembly process are discussed. The film thickness was proportional to the number of dipping cycles. The film resistivity was estimated as 2.19× 10-3ω cm after thermal treatment processes were performed. The estimated specific contact resistance to gold electrodes was 6.33× 10-9 ωm 2 from contact chain measurements. The fabricated three-terminal microelectromechanical switch using these films functioned as a beam for multiple switching cycles with a 4.5 V pull-in voltage. This switch is believed to be a promising device for low power digital logic applications.

Original languageEnglish (US)
Article number073502
JournalApplied Physics Letters
Issue number7
StatePublished - Feb 14 2011

Bibliographical note

Funding Information:
This work was partially supported by the DARPA NEMS Program. We also acknowledge the fabrication and characterization assistance at the Nanofabrication Center and the Characterization Facility at the University of Minnesota, which are supported by NSF through NNIN.

Copyright 2011 Elsevier B.V., All rights reserved.


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