Abstract
A precision film plane digitizer utilizing air bearings for bubble chamber pictures in which the x and y motions are decoupled has been developed. Its inherent accuracy is 1.5 μm or better, and its overall measurement accuracy is 2.5 μm.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 685-693 |
| Number of pages | 9 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 15 |
| Issue number | 4 |
| DOIs | |
| State | Published - Apr 1976 |