Abstract
A precision film plane digitizer utilizing air bearings for bubble chamber pictures in which the x and y motions are decoupled has been developed. Its inherent accuracy is 1.5 μm or better, and its overall measurement accuracy is 2.5 μm.
Original language | English (US) |
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Pages (from-to) | 685-693 |
Number of pages | 9 |
Journal | Japanese Journal of Applied Physics |
Volume | 15 |
Issue number | 4 |
DOIs | |
State | Published - Apr 1976 |