A polymer-based bidirectional micropump driven by a PZT bimorph

Yi Luo, Miao Lu, Tianhong Cui

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


This paper presents a polymer-based micropump for liquid control or drug delivery. The dimension of the pump was 20 × 24 × 3 mm 3. A pair of O-ring SU-8 passive valves was fabricated by lift-off technique to control the fluid movement. Micropumps with dimple, bridge, and cantilever valves were studied. The PZT bimorph acted on the polymer membrane to periodically drive fluid. The maximum flow rate was 16.4 ml/min, and the back pressure was 1,525 mmH 2O at 150 V (Vp-p). In frequency sweeping experiments, two flow rate peaks and back pressure peaks were analyzed. Bidirectional flow rate was achieved by changing the valve seat from a one-size hole to a step hole. The maximum backward flow rate was 5.1 ml/min, and the driving frequency was about 355 Hz higher than the forward flow rate driving frequency.

Original languageEnglish (US)
Pages (from-to)403-409
Number of pages7
JournalMicrosystem Technologies
Issue number3
StatePublished - Mar 2011

Bibliographical note

Funding Information:
This work was partially supported by National Institute of Health (NIH-NIDDK SBIR Phase I Grant R43 DK076320-01A1). The authors also acknowledge the fabrication and characterization assistance at the Nanofabrication Center and the Characterization Facility at the University of Minnesota.


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