A plasma process for the synthesis of cubic-shaped silicon nanocrystals for nanoelectronic devices

Physics

• Nanocrystal 100%
• Plasma Process 100%
• Nanoparticle 66%
• Nucleation 66%
• Silane 66%
• Transistor 33%
• Vapor Phase 33%
• Plasma Density 33%

Material Science

• Silicon 100%
• Nanocrystals 100%
• Silane 40%
• Particle Growth 40%
• Nanoparticle 40%
• Density 20%
• Transistor 20%
• Annealing 20%
• Particle Shape 20%
• Nucleation 20%
• Particle Formation 20%
• Particle Nucleation 20%
• Plasma Density 20%

Keyphrases

• Vertical Transistor 33%
• Constricted Plasma 33%