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A novel method using SiNW to measure stress in cantilevers
Yanfeng Jiang
,
Jianping Wang
Electrical and Computer Engineering
Research output
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Contribution to journal
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Article
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peer-review
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Engineering
Microelectromechanical System
100%
Linear Relationship
100%
Applied Voltage
100%
Measure Stress
100%
Nanowire Device
100%
Earth and Planetary Sciences
Nanowire
100%
Microelectromechanical System
100%
Keyphrases
Silicon Nanowires (SiNWs)
100%
Linear Relationship
20%
Measured Stress
20%
MEMS Devices
20%
Nanowire Devices
20%
Arts and Humanities
Cantilever
100%