A monolithic pixel sensor in 0.15 μ m fully depleted SOI technology

Marco Battaglia; Dario Bisello; Devis Contarato; Peter Denes; Piero Giubilato; Lindsay Glesener; Chinh Vu

doi:10.1016/j.nima.2007.09.042

A monolithic pixel sensor in 0.15 μ m fully depleted SOI technology

Marco Battaglia, Dario Bisello, Devis Contarato, Peter Denes, Piero Giubilato, Lindsay Glesener, Chinh Vu

Physics and Astronomy (Twin Cities)

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18 Scopus citations

Abstract

This letter presents the design of a monolithic pixel sensor with 10 × 10 μ m² pixels in OKI 0.15 μ m fully depleted SOI technology and first results of its characterisation. The response of the chip to charged particles has been studied on the 1.35 GeV e^- beam at the LBNL ALS.

Original language	English (US)
Pages (from-to)	526-528
Number of pages	3
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	583
Issue number	2-3
DOIs	https://doi.org/10.1016/j.nima.2007.09.042
State	Published - Dec 21 2007

Bibliographical note

Funding Information:
This work was supported by the Director, Office of Science, of the US Department of Energy under Contract no. DE-AC02-05CH11231. We are indebted to the ALS staff for their assistance and the excellent performance of the machine.

Keywords

CMOS technology
Monolithic pixel sensor
Particle detection
SOI

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10.1016/j.nima.2007.09.042

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A monolithic pixel sensor in 0.15 μ m fully depleted SOI technology. / Battaglia, Marco; Bisello, Dario; Contarato, Devis et al.
In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 583, No. 2-3, 21.12.2007, p. 526-528.

Research output: Contribution to journal › Article › peer-review

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AU - Bisello, Dario

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AU - Denes, Peter

AU - Giubilato, Piero

AU - Glesener, Lindsay

AU - Vu, Chinh

N1 - Funding Information: This work was supported by the Director, Office of Science, of the US Department of Energy under Contract no. DE-AC02-05CH11231. We are indebted to the ALS staff for their assistance and the excellent performance of the machine.

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KW - Particle detection

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A monolithic pixel sensor in 0.15 μ m fully depleted SOI technology

Abstract

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