A modeling approach based on laminated plate theory to design microbeams

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

MEMs microbeams consist of many thin material layers. This thin layered structure is very similar to that of laminated composite plates in which thin layers of fiber-reinforced plastic are stacked and cured. Both the MEMs layered structure and the composites layered structure will have layers with different mechanical properties. Researchers in composite materials have developed an approach, referred to as laminated plate theory, to solve mechanics problems in these layered structures. This approach can be extended to characterizing MEMs mechanical behavior. For example, laminated plate theory can be used to evaluate displacement of MEMs microbeams that are actuated by PZT. In this work, measured deflections for a 1000 μm long, 300 μm wide, 2.675 μm thick beam are compared to laminated plate theory predictions. The model accurately predicts the deflection as a function of voltage applied to the PZT. An application of laminated plate theory to prediction of residual stresses is also briefly discussed.

Original languageEnglish (US)
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages490-493
Number of pages4
StatePublished - Dec 1 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: Feb 23 2003Feb 27 2003

Publication series

Name2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Volume1

Other

Other2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period2/23/032/27/03

Keywords

  • Deflection
  • Microbeams
  • PZT actuation
  • Plate theory

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