A microwave plasma density measuring system with microsecond response time

Stanley G. Burns, James B. Beyer

Research output: Contribution to journalArticle

Abstract

Based on the STALO (acronym for STAbilization of Local Oscillator) system wherein an external high Q cavity is used to frequency stabilize a reflex klystron, a technique was developed using a microwave Fabry-Perot resonator (MFPR) operating at 35 GHz for performing time varying plasma diagnostics over a two to three order of magnitude range centered at 5×109 electrons/cm3. Experimental results are given for 2 MHz density variations in a 125 μ He rf induced discharge. The frequency response is an order of magnitude faster than an external feedback control system (also described) which utilizes the MFPR. Calibration techniques as well as the underlying theory are also given.

Original languageEnglish (US)
Pages (from-to)33-36
Number of pages4
JournalReview of Scientific Instruments
Volume41
Issue number1
DOIs
StatePublished - Dec 1 1970

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Plasma density
plasma density
Resonators
resonators
Microwaves
microwaves
Plasma diagnostics
abbreviations
reflexes
plasma diagnostics
feedback control
frequency response
Feedback control
Frequency response
Q factors
Stabilization
stabilization
oscillators
Calibration
Control systems

Cite this

A microwave plasma density measuring system with microsecond response time. / Burns, Stanley G.; Beyer, James B.

In: Review of Scientific Instruments, Vol. 41, No. 1, 01.12.1970, p. 33-36.

Research output: Contribution to journalArticle

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