A micromachined chemical sensor for sea floor environments: Initial results

Tao Li; Kang Ding; William E. Seyfried; Yogesh B. Gianchandani

doi:10.31438/trf.hh2012.46

A micromachined chemical sensor for sea floor environments: Initial results

Tao Li, Kang Ding, William E. Seyfried, Yogesh B. Gianchandani

Earth and Environmental Sciences-Twin Cities

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper reports a micromachined chemical sensor intended for harsh environments such as those near hydrothermal vents at the sea floor. The sensor is intended to measure the pH, dissolved H2 and H2S, and temperature. The device is 12 mm in diameter and 6 mm in effective length, including packaging. A YSZ|HgO|Hg solid electrode is used as a common electrode for measurement of the three chemical quantities. The YSZ diaphragm used for this electrode is <500 μm thick, allowing sufficient ion conductance at temperatures >35°C. The other electrodes are thin-film metal electrodes fabricated on the same YSZ diaphragm: an Ag/AgCl reference electrode for pH sensing, an Ag/Ag₂S electrode for H₂S sensing, and a Pt electrode for H₂ sensing. The two temperature sensors are thin film Pt resistors. Initial tests have been performed to test the functionality of the pH and H2S sensors; measurements are in line with expectations.

Original language	English (US)
Title of host publication	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Editors	Mehran Mehregany, David J. Monk
Publisher	Transducer Research Foundation
Pages	173-176
Number of pages	4
ISBN (Electronic)	9780964002494
DOIs	https://doi.org/10.31438/trf.hh2012.46
State	Published - 2012
Event	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States Duration: Jun 3 2012 → Jun 7 2012

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Other

Other	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Country/Territory	United States
City	Hilton Head
Period	6/3/12 → 6/7/12

Bibliographical note

Publisher Copyright:
© 2012 TRF.

Publisher link

10.31438/trf.hh2012.46

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Li, T., Ding, K., Seyfried, W. E., & Gianchandani, Y. B. (2012). A micromachined chemical sensor for sea floor environments: Initial results. In M. Mehregany, & D. J. Monk (Eds.), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 (pp. 173-176). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2012.46

A micromachined chemical sensor for sea floor environments: Initial results. / Li, Tao; Ding, Kang; Seyfried, William E. et al.
2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. ed. / Mehran Mehregany; David J. Monk. Transducer Research Foundation, 2012. p. 173-176 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Li, T, Ding, K, Seyfried, WE & Gianchandani, YB 2012, A micromachined chemical sensor for sea floor environments: Initial results. in M Mehregany & DJ Monk (eds), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 173-176, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012, Hilton Head, United States, 6/3/12. https://doi.org/10.31438/trf.hh2012.46

Li T, Ding K, Seyfried WE, Gianchandani YB. A micromachined chemical sensor for sea floor environments: Initial results. In Mehregany M, Monk DJ, editors, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Transducer Research Foundation. 2012. p. 173-176. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2012.46

Li, Tao ; Ding, Kang ; Seyfried, William E. et al. / A micromachined chemical sensor for sea floor environments : Initial results. 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. editor / Mehran Mehregany ; David J. Monk. Transducer Research Foundation, 2012. pp. 173-176 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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abstract = "This paper reports a micromachined chemical sensor intended for harsh environments such as those near hydrothermal vents at the sea floor. The sensor is intended to measure the pH, dissolved H2 and H2S, and temperature. The device is 12 mm in diameter and 6 mm in effective length, including packaging. A YSZ|HgO|Hg solid electrode is used as a common electrode for measurement of the three chemical quantities. The YSZ diaphragm used for this electrode is <500 μm thick, allowing sufficient ion conductance at temperatures >35°C. The other electrodes are thin-film metal electrodes fabricated on the same YSZ diaphragm: an Ag/AgCl reference electrode for pH sensing, an Ag/Ag2S electrode for H2S sensing, and a Pt electrode for H2 sensing. The two temperature sensors are thin film Pt resistors. Initial tests have been performed to test the functionality of the pH and H2S sensors; measurements are in line with expectations.",

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AB - This paper reports a micromachined chemical sensor intended for harsh environments such as those near hydrothermal vents at the sea floor. The sensor is intended to measure the pH, dissolved H2 and H2S, and temperature. The device is 12 mm in diameter and 6 mm in effective length, including packaging. A YSZ|HgO|Hg solid electrode is used as a common electrode for measurement of the three chemical quantities. The YSZ diaphragm used for this electrode is <500 μm thick, allowing sufficient ion conductance at temperatures >35°C. The other electrodes are thin-film metal electrodes fabricated on the same YSZ diaphragm: an Ag/AgCl reference electrode for pH sensing, an Ag/Ag2S electrode for H2S sensing, and a Pt electrode for H2 sensing. The two temperature sensors are thin film Pt resistors. Initial tests have been performed to test the functionality of the pH and H2S sensors; measurements are in line with expectations.

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A micromachined chemical sensor for sea floor environments: Initial results

Abstract

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