A MEMS-based micro heat engine with integrated thermal switch

Keyphrases

• MEMS-based 100%
• Thermal Switch 100%
• Micro Heat Engine 100%
• Thick Silicon 66%
• Silicon Membrane 66%
• Working Fluid 33%
• Operating Speed 33%
• Work Output 33%
• Mechanical Work 33%
• Silicon Nitride Membrane 33%
• Membrane Compliance 33%
• Membrane Deflection 33%
• Flexible Membrane 33%
• Heat-integrated 33%
• Heat Input 33%
• Operating Pressure 33%
• Mechanical Power 33%
• Temperature Cooling 33%

Engineering

• Microelectromechanical System 100%
• Heat Engine 100%
• Internals 50%
• Constant Temperature 50%
• Operating Speed 50%
• Reject Heat 50%
• Heat Input 50%
• Output Work 50%
• Mechanical Power 50%
• Operating Pressure 50%
• Nitride 50%