A low-cost hands-on laboratory to introduce lithography concepts

Maryam Jalali, James J. Marti, Allison L. Kirchhoff, Frances Lawrenz, Stephen A. Campbell

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithographywithout using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools.

Original languageEnglish (US)
Pages (from-to)517-524
Number of pages8
JournalIEEE Transactions on Education
Volume55
Issue number4
DOIs
StatePublished - 2012

Keywords

  • Hot embossing
  • Lithography
  • Microelectromechanical systems (MEMS)
  • Microfabrication
  • Microimprint

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