A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon-Containing Block Copolymers

Gregory Blachut, Stephen M. Sirard, Michael J. Maher, Yusuke Asano, Yasunobu Someya, Austin P. Lane, William J. Durand, Christopher M. Bates, Andrew M. Dinhobl, Roel Gronheid, Diane Hymes, Christopher J. Ellison, C. Grant Willson

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Engineering & Materials Science

Chemical Compounds