A hands-on laboratory for teaching microfabrication

James Marti; Mandip Sibakoti; Maryam Jalali; Stephen A. Campbell

doi:10.1109/NANO.2013.6721011

A hands-on laboratory for teaching microfabrication

James Marti, Mandip Sibakoti, Maryam Jalali, Stephen A. Campbell

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.

Original language	English (US)
Title of host publication	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Pages	1022-1025
Number of pages	4
DOIs	https://doi.org/10.1109/NANO.2013.6721011
State	Published - 2013
Event	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, China Duration: Aug 5 2013 → Aug 8 2013

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
ISSN (Print)	1944-9399
ISSN (Electronic)	1944-9380

Other

Other	2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
Country/Territory	China
City	Beijing
Period	8/5/13 → 8/8/13

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/NANO.2013.6721011

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Marti, J, Sibakoti, M, Jalali, M & Campbell, SA 2013, A hands-on laboratory for teaching microfabrication. in 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013., 6721011, Proceedings of the IEEE Conference on Nanotechnology, pp. 1022-1025, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, China, 8/5/13. https://doi.org/10.1109/NANO.2013.6721011

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abstract = "A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.",

author = "James Marti and Mandip Sibakoti and Maryam Jalali and Campbell, {Stephen A.}",

year = "2013",

doi = "10.1109/NANO.2013.6721011",

language = "English (US)",

isbn = "9781479906758",

series = "Proceedings of the IEEE Conference on Nanotechnology",

pages = "1022--1025",

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note = "2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 ; Conference date: 05-08-2013 Through 08-08-2013",

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AU - Sibakoti, Mandip

AU - Jalali, Maryam

AU - Campbell, Stephen A.

PY - 2013

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N2 - A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.

AB - A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.

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SN - 9781479906758

T3 - Proceedings of the IEEE Conference on Nanotechnology

SP - 1022

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BT - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

T2 - 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013

Y2 - 5 August 2013 through 8 August 2013

ER -

A hands-on laboratory for teaching microfabrication

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