A fully integrated wafer-scale sub-mm3 FBAR-based wireless mass sensor

Manohar Nagaraju; Jingren Gu; Andrew Lingley; Fan Zhang; Martha Small; Richard Ruby; Brian Otis

doi:10.1109/FCS.2014.6859916

A fully integrated wafer-scale sub-mm³ FBAR-based wireless mass sensor

Manohar Nagaraju, Jingren Gu, Andrew Lingley, Fan Zhang, Martha Small, Richard Ruby, Brian Otis

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

A wireless sub-mm³ FBAR-based mass sensor fully integrated in a hermetic package is demonstrated. We propose a wafer-scale commercially viable manufacturing process for the integration of the sensor and the interface circuitry. The drift in frequency of the FBAR sensor due to temperature, aging and stress is reduced by a factor of 10 through an integrated differential measurement. The sensor achieves a sensitivity of 0.45kHz.cm²/ng and consumes 14.7mW including the wireless link. The operation of the sensor has been demonstrated in thin film deposition and wireless humidity sensing experiments.

Original language	English (US)
Title of host publication	IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Print)	9781479949168
DOIs	https://doi.org/10.1109/FCS.2014.6859916
State	Published - Jan 1 2014
Event	2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, Province of China Duration: May 19 2014 → May 22 2014

Other

Other	2014 IEEE International Frequency Control Symposium, IFCS 2014
Country/Territory	Taiwan, Province of China
City	Taipei
Period	5/19/14 → 5/22/14

Publisher link

10.1109/FCS.2014.6859916

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Nagaraju, M, Gu, J, Lingley, A, Zhang, F, Small, M, Ruby, R & Otis, B 2014, A fully integrated wafer-scale sub-mm³ FBAR-based wireless mass sensor. in IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings., 6859916, IEEE Computer Society, 2014 IEEE International Frequency Control Symposium, IFCS 2014, Taipei, Taiwan, Province of China, 5/19/14. https://doi.org/10.1109/FCS.2014.6859916

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AU - Ruby, Richard

AU - Otis, Brian

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