A fully integrated wafer-scale sub-mm3 FBAR-based wireless mass sensor

Manohar Nagaraju, Jingren Gu, Andrew Lingley, Fan Zhang, Martha Small, Richard Ruby, Brian Otis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


A wireless sub-mm3 FBAR-based mass sensor fully integrated in a hermetic package is demonstrated. We propose a wafer-scale commercially viable manufacturing process for the integration of the sensor and the interface circuitry. The drift in frequency of the FBAR sensor due to temperature, aging and stress is reduced by a factor of 10 through an integrated differential measurement. The sensor achieves a sensitivity of 0.45kHz.cm2/ng and consumes 14.7mW including the wireless link. The operation of the sensor has been demonstrated in thin film deposition and wireless humidity sensing experiments.

Original languageEnglish (US)
Title of host publicationIFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781479949168
StatePublished - Jan 1 2014
Event2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, Province of China
Duration: May 19 2014May 22 2014


Other2014 IEEE International Frequency Control Symposium, IFCS 2014
Country/TerritoryTaiwan, Province of China


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