A four degree of freedom MEMS microgripper with novel bi-directional thermal actuators

Michael A. Greminger, A. Serdar Sezen, Bradley J. Nelson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Scopus citations

Abstract

A four degree of freedom thermally actuated MEMS microgripper is presented in this paper. Each jaw of the microgripper has independent x and y degrees of freedom. These extra degrees of freedom give the gripper added dexterity for manipulating microparts. The motion of each gripper jaw is provided by a two degree of freedom compliant mechanism which is based on a μve bar rigid link mechanism. This gripper also introduces a novel thermal microactuator design that is capable of bi-directional actuation giving it a greater range of motion than previous thermal actuator designs. The actuator provides a total range of motion of 12.7 μm and a maximum force of 1.9 mN. Also, since this microgripper is based on a compliant mechanism, deformable object tracking can be used to provide force as well as position feedback for the gripper. This combination of an increased number of degrees of freedom and increased sensory feedback provides a level of dexterity that has not been previously available in microassembly.

Original languageEnglish (US)
Title of host publication2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS
PublisherIEEE Computer Society
Pages2814-2819
Number of pages6
ISBN (Print)0780389123, 9780780389120
DOIs
StatePublished - 2005

Publication series

Name2005 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS

Keywords

  • Compliant mechanism
  • MEMS
  • Microassembly
  • Microgripper
  • Microrobotics

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